Laser irradiation apparatus and laser irradiation method

摘要

A laser irradiation apparatus of the embodiment includes: a laser light transmission mechanism (14) to guide laser light from a laser light source and emit the laser light from a laser light emission part; a condensing mechanism (11) to condense the laser light; a pipe state casing (12) to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light; a fluid supply mechanism (13) to supply a fluid into the casing to emit the fluid from the opening part; a positioning mechanism (19) provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism (17) to guide the fluid emitted from the opening part to flow between the casing and the processing object along an axial direction of the casing.