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发明名称
Target cooling device
摘要
申请公布号
EP2267179(B1)
申请公布日期
2012.12.26
申请号
EP20090163730
申请日期
2009.06.25
申请人
SOLMATES B.V.
发明人
BROEKMAAT, JOSKA JOHANNES;JANSSENS, JAN ARNOUD;DEKKERS, JAN MATTHIJN
分类号
C23C14/50;C23C14/28;C23C14/54;H01L21/67
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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