APPARATUS FOR FASTENING CHIP AND TESTING METHOD USING THEM

摘要

PURPOSE: A chip fixing apparatus and a chip testing method thereof are provided to improve the efficiency of operation process. CONSTITUTION: A chip fixing apparatus includes a chip tray(100) and a support chuck(200). The chip tray defines multiple field regions(110) on the surface and contains a first internal vacuum line(120). The support chuck contains a second internal vacuum line(220) and supports the chip tray.