APPARATUS FOR CONTROLLING DEGREE OF VACUUM OF VACUUM CHAMBER, BONDING APPARATUS INCLUDING THE SAME, METHOD FOR CONTROLLING DEGREE OF VACUUM OF VACUUM CHAMBER, AND METHOD FOR CONTROLLING DEGREE OF VACUUM OF BONDING APPARATUS

摘要

PURPOSE: An apparatus for controlling the degree of vacuum of a vacuum chamber, a bonding apparatus including the same, a method for controlling the degree of vacuum of the vacuum chamber, and a method for controlling the degree of vacuum of the bonding apparatus are provided to implement vacuum degree control with high precision by regulating the flow rate of gas drawn in to a vacuum chamber with a flow control valve with a controlled opening and closing rate. CONSTITUTION: An apparatus for controlling the degree of vacuum of a vacuum chamber comprises a vacuum path(39) for vacuuming a vacuum chamber(D), a flow control valve(30) drawing gas into the vacuum chamber, and a controller(32) controlling the opening and closing rate of the flow control valve based on the vacuum pressure of the vacuum chamber. [Reference numerals] (AA) Air and other gases