| 摘要 |
PURPOSE: A joining apparatus and method are provided to prevent a decrease in the service life of a seal unit as the seal unit attached to a seal groove is cooled by a cooling passage. CONSTITUTION: A joining apparatus comprises a pressing mechanism, heating plates(26), a frame(30), a vacuum chamber(C), a seal unit(34), and a frame cooling unit(38). The heating plates are placed in the direction of applying press power. The heating plates comprise heat sources. The frame is placed at the side of the heating plate. The heating plates adjacent to each other in an acting direction of pressure are stacked so that the vacuum chamber is formed between the heating plates. Materials are thermally pressed by the heating plates in the vacuum chamber. The seal unit is formed between the heating plates and the frame, and tightly seals the vacuum chamber. The frame cooling unit cools the frame and seal unit.
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