,申请号JP20060543484-传众专利搜索

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发明名称
摘要
申请公布号	JP5106858(B2)	申请公布日期	2012.12.26
申请号	JP20060543484	申请日期	2004.12.10
申请人		发明人
分类号	G02B17/08;G02B13/14;G02B13/24;G02B17/00;G03F7/20;H01L21/027	主分类号	G02B17/08
代理机构		代理人
主权项
地址

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