Indium target for sputtering device and assembly and method for producing such indium targets,申请号EP20100155360-传众专利搜索

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发明名称	Indium target for sputtering device and assembly and method for producing such indium targets
摘要
申请公布号	EP2228464(B1)	申请公布日期	2012.12.26
申请号	EP20100155360	申请日期	2010.03.03
申请人	FHR ANLAGENBAU GMBH	发明人	RAENSCH, CHRISTIAN;BOEHLING, MARIAN;DERLITZKI, ULRICH;HESSE, GREGOR
分类号	C23C14/34;B23D23/00	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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