发明名称 Process for producing semiconductor device
摘要 A process for producing a semiconductor device comprises mounting of a semiconductor element on a circuit board via a thermosetting resin-based adhesive by means of a thermocompression process, wherein the thermocompression process is carried out under a first set of conditions (pressure = P<1> and temperature = T<1>) designed to eliminate voids present in the adhesive, and subsequently under a second set of conditions (pressure = P<2> and temperature = T<2>) designed to bring about curing of the thermosetting resin, provided that pressure P<2> of the second set of conditions is set to a lower level than the pressure P<1> of the first set of conditions.
申请公布号 EP1047124(B1) 申请公布日期 2012.12.26
申请号 EP20000108457 申请日期 2000.04.18
申请人 SONY CHEMICAL & INFORMATION DEVICE CORPORATION 发明人 AKUTSU, YASUSHI
分类号 H01L21/52;H01L21/58;H01L21/60;H01L23/02;H01L23/12 主分类号 H01L21/52
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