METHOD FOR MANUFACTURING CONTACTOR, METHOD FOR MANUFACTURING SEMICONDUCTOR INSPECTION APPARATUS, CONTACTOR AND SEMICONDUCTOR INSPECTION APPARATUS INCLUDING THE SAME

摘要

PURPOSE: A method for manufacturing a contactor, a method for manufacturing a semiconductor inspection apparatus, a contactor and a semiconductor inspection apparatus including the same are provided to inspect a large scale integrated circuit or a non-memory semiconductor. CONSTITUTION: One end of a contactor(3) comes into contact with a semiconductor. The contactor is formed in a taper form or cutting edge shape by being wet etched through an alkali solution. An epoxy resin layer connects multiple contactors to a substrate(5).