| 摘要 |
PURPOSE: A volume measuring device and a volume variation measuring method are provided to accurately measure a volume variation of a thermosetting resin in thermal curing. CONSTITUTION: A volume measuring device comprises a heating table(10), a mounting unit(13), a heating unit, a temperature measuring unit, a temperature control unit(19), and a volume measuring unit. The heating table heats the thermosetting resin. The mounting unit is formed on a top surface of the heating table into a recessed shape. An inner surface of the recessed shape is formed with a material in which interfacial tension energy is greater than15mN/m and less than 30mN/m. The heating unit heats the heating table and the temperature measuring unit measures the temperature of the heating table. The temperature control unit controls the temperature of the heating unit according to the temperature measured by the temperature measuring unit. The volume measuring unit measures the volume of a thermosetting resin mounted on the mounting unit. [Reference numerals] (10) Heating table; (11) Carbon fluoride resin plate; (12) Chamber; (13) Mounting unit; (14) Decompression pump; (15) Glass window; (16) Heater; (17) Thermocouple; (18) Under-fill material; (19) Temperature control unit; (20) Laser displacement gauge; (21) Exhaust port; (22) Hole; (26) Control unit |
