发明名称 |
Method for processing solar cell substrates |
摘要 |
A method for processing solar cells comprising: providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing; composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber, loading the solar cell substrates into the process chamber; subjecting the solar cell substrates to a process in the process chamber.
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申请公布号 |
US8338210(B2) |
申请公布日期 |
2012.12.25 |
申请号 |
US20100814899 |
申请日期 |
2010.06.14 |
申请人 |
RIDDER DE CHRIS G. M.;BOONSTRA KLAAS P.;GARSSEN ADRIAAN;HUUSSEN FRANK;ASM INTERNATIONAL N.V. |
发明人 |
RIDDER DE CHRIS G. M.;BOONSTRA KLAAS P.;GARSSEN ADRIAAN;HUUSSEN FRANK |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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