发明名称 Method for producing an element, including a multiplicity of nanocylinders on a substrate
摘要 A method for producing an element including a substrate having a plurality of nanocylinders deposited thereon includes providing the substrate. The substrate is covered with a nanoporous Al2O3 membrane so as to provide a covered substrate. The covered substrate is alternately vapor-deposited, at a vapor-deposition temperatures from 250° C. to 400° C., with atoms of a magnetic element and atoms of a non-magnetic element so as to provide the plurality of nanocylinders. Each nanocylinder includes at least four superposed layers including, alternatively, the atoms of the magnetic element and the atoms of the non-magnetic element. The nanoporous Al2O3 membrane is then removed so that the nanocylinders remain on the substrate.
申请公布号 US8337945(B2) 申请公布日期 2012.12.25
申请号 US20070300557 申请日期 2007.04.28
申请人 ELLRICH JENS;YONG LEI;HAHN HORST;FORSCHUNGSZENTRUM KARLSRUHE GMBH 发明人 ELLRICH JENS;YONG LEI;HAHN HORST
分类号 C23C16/40;B05D5/12 主分类号 C23C16/40
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