| 发明名称 |
Silicon crystallization system and silicon crystallization method using laser |
| 摘要 |
A silicon crystallization system includes a vibration device for vibrating a linear laser beam along a longer-axis direction of the linear laser beam. A vibration frequency at which the laser beam is vibrated is periodically generated and randomly changes within a predetermined range. |
| 申请公布号 |
US8337618(B2) |
申请公布日期 |
2012.12.25 |
| 申请号 |
US20100911937 |
申请日期 |
2010.10.26 |
| 申请人 |
KWON OH-SEOB;LEE SANG-JO;LEE HONG-RO;RYU JE-KIL;SAMSUNG DISPLAY CO., LTD. |
发明人 |
KWON OH-SEOB;LEE SANG-JO;LEE HONG-RO;RYU JE-KIL |
| 分类号 |
C30B28/12 |
主分类号 |
C30B28/12 |
| 代理机构 |
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| 主权项 |
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