发明名称 Method for processing a memory link with a set of at least two laser pulses
摘要 A set (50) of laser pulses (52) is employed to sever a conductive link (22) in a memory or other IC chip. The duration of the set (50) is preferably shorter than 1,000 ns; and the pulse width of each laser pulse (52) within the set (50) is preferably within a range of about 0.1 ps to 30 ns. The set (50) can be treated as a single pulse by conventional laser positioning systems (62) to perform on-the-fly link removal without stopping whenever the laser system (60) fires a set (50) of laser pulses (52) at each link (22). Conventional IR wavelengths or their harmonics can be employed.
申请公布号 US8338746(B2) 申请公布日期 2012.12.25
申请号 US20100705433 申请日期 2010.02.12
申请人 SUN YUNLONG;SWENSON EDWARD J.;HARRIS RICHARD S.;ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 SUN YUNLONG;SWENSON EDWARD J.;HARRIS RICHARD S.
分类号 B23K26/02;B23K26/04;B23K26/06;B23K26/067;B23K26/08;B23K26/38;B23K26/40;H01L21/768;H01L23/525;H01S3/00 主分类号 B23K26/02
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