发明名称 Magnetoresistive element including upper electrode having hexagonal cross-section shape and method of manufacturing the same
摘要 A magnetoresistive element of an aspect of the present invention including a lower electrode provided on an insulating layer on a semiconductor substrate, a first ferromagnetic layer provided on the lower electrode, a first tunnel barrier layer provided on the first ferromagnetic layer, a second ferromagnetic layer provided on the first tunnel barrier layer, and an upper electrode provided on the second ferromagnetic layer, wherein the upper electrode has a hexagonal cross-sectional shape, and a maximum size of the upper electrode in a first direction is larger than a size of the first tunnel barrier layer in the first direction, the first direction being horizontal relative to a surface of the semiconductor substrate.
申请公布号 US8339841(B2) 申请公布日期 2012.12.25
申请号 US20100704157 申请日期 2010.02.11
申请人 IWAYAMA MASAYOSHI;KABUSHIKI KAISHA TOSHIBA 发明人 IWAYAMA MASAYOSHI
分类号 H01L29/82 主分类号 H01L29/82
代理机构 代理人
主权项
地址
您可能感兴趣的专利