发明名称 Shape-measuring interferometer having low-coherence source conjugate to the examined object
摘要 Interferometers are provided for measuring the surface shape of an examined object or a transmitted wavefront through the examined object. An exemplary interferometer includes an area light source having a low spatial coherence property, and a light-guiding optical system configured to arrange the area light source and the examined object in an optically conjugate relation with each other.
申请公布号 US8339612(B2) 申请公布日期 2012.12.25
申请号 US20100780826 申请日期 2010.05.14
申请人 LIU ZHIGIANG;NIKON CORPORATION 发明人 LIU ZHIGIANG
分类号 G01B11/02 主分类号 G01B11/02
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