发明名称 |
Stage for substrate |
摘要 |
A stage is provided on which is mounted a substrate that has a concavo-convex portion such as a circuit formed on the underside thereof. A channel 3 through which a coolant such as water flows is formed in a stage 1. An annular flange portion 4 is formed on the top surface of the stage 1. The inner side of the flange portion 4 forms a concave portion 5. The top surface of the flange portion 4 is provided with a smooth finish in order to mount a peripheral section of the underside of a substrate W thereon. Holes through which are passed three positioning pins 6 and lift pins 7 are provided in the flange portion 4 at regular intervals in the circumferential direction. |
申请公布号 |
US8336866(B2) |
申请公布日期 |
2012.12.25 |
申请号 |
US20090384719 |
申请日期 |
2009.04.08 |
申请人 |
FUJII YASUSHI;HASEGAWA TAKUMA;TOKYO OHKA KOGYO CO., LTD. |
发明人 |
FUJII YASUSHI;HASEGAWA TAKUMA |
分类号 |
B25B1/00;B23Q3/00;B24B5/16;B25B1/02;B25B1/10;B25B1/24;B25B5/00;H01L21/687 |
主分类号 |
B25B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|