THIN FILM BATTERY FABRICATION WITH MASK-LESS ELECTROLYTE DEPOSITION
摘要
A method of fabricating a thin film battery may include a blanket deposition of an electrolyte layer followed by selective laser patterning of the electrolyte layer. Some or all the other device layers may be in situ patterned layers - formed using shadow masks.
申请公布号
WO2012173874(A2)
申请公布日期
2012.12.20
申请号
WO2012US41410
申请日期
2012.06.07
申请人
APPLIED MATERIALS, INC.;SONG, DAOYING;JIANG, CHONG;KWAK, BYUNG SUNG, LEO
