| 摘要 |
PURPOSE: An electrolyte and ultrapure water moving apparatus for electropolishing is provided to use a small amount of electrolyte for a long period of time by recovering and filtering the electrolyte. CONSTITUTION: An ultrapure water moving apparatus for electropolishing comprises an electrolyte tank(20), an ultrapure water tank(30), a heater(40), and a temperature sensor(50). The electrolyte tank and the ultrapure water tank are mounted on two sides at the top of a cart(10). The heater and the temperature sensor are installed in the lower side of the electrolyte tank and the ultrapure water tank. An air pump(61), a pulsation dampener(62), and a feed hose(63) are successively connected from an outlet pipe(60) at the lower side in the electrolyte tank. A filter(71), an air pump(72), and a recovery hose(73) are successively connected from an inlet pipe(70) at the upper side in the electrolyte tank. A magnetic pump(81) and a feed hose(82) are connected from an outlet pipe(80) at the lower side in the ultrapure water tank. A magnetic pump(91) and a supplement hose(92) are connected from an inlet pipe(90) at the upper side in the ultrapure water tank. [Reference numerals] (11) Control box; (12) Compressor; (AA, CC) Bottom; (BB, DD) Top
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