| 摘要 |
<P>PROBLEM TO BE SOLVED: To distinctly discriminate and measure dimensions of an upper part and a lower part of a rugged pattern. <P>SOLUTION: A dimension measuring instrument includes: a microscope 1 for enlarging and observing the rugged pattern formed on a substrate 5; an imaging camera 2 for imaging the rugged pattern observed through the microscope 1; an illuminating optical system 3 for applying scattered light from the outside of a visual field of an objective lens 7 of the microscope 1 to the inside of the visual field; and control means 4 for inputting an image of the imaging camera 2, displaying the image on a screen 17a of a display part 17 and measuring dimensions of either one or both of the upper part and lower part of the rugged pattern included within a range inputted by input means 16 and designated on the display screen 17a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
