发明名称 MANUFACTURING METHOD OF MULTI-JUNCTION PHOTOELECTRIC CONVERSION APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a multi-junction photoelectric conversion apparatus which achieves high battery performance while inhibiting stripe shaped defects from occurring from a recessed part to a photoelectric conversion layer. <P>SOLUTION: In a multi-junction photoelectric conversion apparatus 100, a transparent electrode layer 2, a power generation cell layer 91, an intermediate contact layer 5, another power generation cell layer 92, and a rear surface electrode layer 4 are formed on a translucent substrate 1 in sequence. In a manufacturing method of the multi-junction photoelectric conversion apparatus 100, an irregular shape is formed on an upper surface of the power generation cell layer 91, and the intermediate contact layer 5 is selectively formed in a recessed part on the upper surface of the power generation cell layer 91. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012253078(A) 申请公布日期 2012.12.20
申请号 JP20110122513 申请日期 2011.05.31
申请人 MITSUBISHI HEAVY IND LTD 发明人
分类号 H01L31/04 主分类号 H01L31/04
代理机构 代理人
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