| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measurement device which is inexpensive, and has high resolution in a width direction and can measure a shape of a body to be measured with high precision. <P>SOLUTION: The shape measurement device includes: slit light sources 2a, 2b which are arranged in a plane perpendicular to a conveyance direction of a body 1 to be measured and obliquely above or below it, and emit slit light beams; image pickup parts 3a, 3b which are located on the opposite side from the slit light sources 2a, 2b across the body 1 to be measured and obliquely above or below the body 1 to be measured, and pick up the slit light beams irradiating a top surface 1a or a reverse surface 1b of the body 1 to be measured from a direction deviating by a predetermined angle from the irradiation directions thereof; coordinate conversion parts 4a, 4b which convert coordinates of picked-up images of the top surface 1a and the reverse surface 1b of the body to be measured picked up by the image pickup parts 3a, 3b to those as if the image pickup parts 3a, 3b pick up on irradiation lines from the slit light sources 2a, 2b; and a sectional thickness shape arithmetic part 5 which computes a sectional thickness shape of the body 1 to be measured on the basis of the coordinates of the picked-up images after the coordinate conversion. <P>COPYRIGHT: (C)2013,JPO&INPIT |
