发明名称 THIN FILM TRANSISTOR, THIN FILM TRANSISTOR PANEL AND METHODS FOR MANUFACTURING THE SAME
摘要 A thin film transistor includes a gate electrode, a gate insulating layer, an oxide semiconductor layer on the gate insulating layer, and a drain electrode and a source electrode on the oxide semiconductor layer and spaced apart from each other. The drain electrode includes a first drain sub-electrode on the oxide semiconductor layer, and a second drain sub-electrode on the first drain sub-electrode. The source electrode includes a first source sub-electrode on the oxide semiconductor layer, and a second source sub-electrode on the first source sub-electrode. The first drain sub-electrode and the first source sub-electrode include gallium zinc oxide (GaZnO), and the second source sub-electrode and the second drain sub-electrode include a metal atom.
申请公布号 US2012319112(A1) 申请公布日期 2012.12.20
申请号 US201113223746 申请日期 2011.09.01
申请人 CHO SUNG-HAENG;PARK JAE-WOO;KIM DO-HYUN;SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO SUNG-HAENG;PARK JAE-WOO;KIM DO-HYUN
分类号 H01L29/786 主分类号 H01L29/786
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