| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask manufacturing apparatus which can display the map data at high speed with high accuracy. <P>SOLUTION: The mask manufacturing apparatus comprises a map data acquisition unit (221) which acquires the map data consisting of multiple meshes each having a mesh value, a display unit (204) having a display screen for displaying the map data, a setting unit (222) which sets a pseudo pixel size larger than the pixel size of the display screen, a grouping unit (223) which groups the pixels on the display screen into pseudo pixels, an average value calculation unit (224) which calculates the average mesh value of meshes in each pseudo pixel when the mesh size of meshes on the display screen is smaller than α times (α is a positive constant) of the pseudo pixel size, and a display processing unit (225) which displays the map data on the display screen by displaying each pixel in the pseudo pixel by a display color corresponding to the average value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
