| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a position detecting apparatus configured to detect a position of a moving body by using a secondary-side magnetic field of a linear motor does not have detection accuracy applicable to a mobile device of precise equipment. <P>SOLUTION: A major position operator 20 outputs main position data being high-order digit of a current position. A sub position operator 60 outputs sub-position data being low-order digit of the current position. The major position operator 20 generates a count signal by obtaining a two-phase rectangular wave signal from a detection signal of a magnetic sensor 10, and obtains major operation data by performing cumulative addition and subtraction of the count signal. A digital filter 40 filters a vibration component of the detection signal by a moving average. The sub position operator 60 obtains sub position data by finding an inverse tangent of the detection signal. A position operator 70 generates position data by adding the major position data and the sub position data. A pitch correction device 90 corrects the position data to a moving direction by a pitch correction value, and outputs the obtained position data to a movement control device 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
