| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of precisely detecting a position of a subject (for example, marks formed on rear and front faces of a board). <P>SOLUTION: There is provided a detector for detecting a position of a subject, which comprises: an illumination system for illuminating the subject using light including a first wavelength band and a second wavelength band different from the first wavelength band; an imaging system for forming an image of the subject by light from the subject; an image pickup device for picking up the subject image; and an optical member for reducing a difference in intensity between light intensity of the first wavelength band for forming the subject image picked up by the image pickup device and light intensity of the second wavelength band for forming the subject image picked up by the image pickup device by causing a transmission factor for light of the first wavelength band in a light path of the illumination system or the imaging system to differ from a transmission factor for light of the second wavelength band. <P>COPYRIGHT: (C)2013,JPO&INPIT |
