Method For Reducing Mechanical Cross-Talk Between Array Structures On A Substrate Mounted to Another Substrate By An Adhesive

摘要

A method of mounting a substrate having an array of actuators to another substrate in a way that reduces mechanical linkage between the actuators has been developed. The method includes cutting a first plurality of channels and a second plurality of channels in a substrate on which a plurality of actuators have been formed, each actuator having two sides that are parallel to one another and longer than two other shorter parallel sides of each actuator. The first plurality of channels is cut between the longer sides of adjacent actuators and the second plurality of channels is cut between the shorter sides of adjacent actuators. The channels in the second plurality of channels have a width that is less than a width of the channels in the first plurality of channels.