| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a CZTS thin film solar cell having high photoelectric conversion efficiency. <P>SOLUTION: A CZTS thin film solar cell manufacturing method comprises the steps of: forming a metal back electrode layer (2) on a substrate (1); forming a p-type CZTS light absorption layer (3) on the metal back electrode layer (2); forming an n-type high resistance buffer layer (4) on the p-type CZTS light absorption layer (3); subsequently annealing, in an oxygen-containing atmosphere, the substrate (1) on which the n-type high resistance buffer layer (4) is formed; and forming, after annealing, an n-type transparent conductive film (5) on the n-type high resistance buffer layer (4). <P>COPYRIGHT: (C)2013,JPO&INPIT |
