| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon plate for flexible substrate conveyance which allows a flexible substrate to be peeled easily from a silicone plate and prevents curl from remaining on the flexible substrate. <P>SOLUTION: A silicone plate for flexible substrate conveyance is a silicon plate for holding a conveyed flexible substrate and has regions, having different viscosity, on a silicone surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
