| 摘要 |
PURPOSE: An optical measurement signal collecting system for diagnosing plasma is provided to transmit optical measurement signals by a serial type by using a time division multiplexing method and to reduce installation costs for a diagnosing device. CONSTITUTION: An optical measurement signal collecting system for diagnosing plasma comprises a plurality of measuring devices, a plurality of channels(111-115), and a time division multiplexer(120). The optical measuring device generates optical measurement signals by measuring electromagnetic waves emitted from plasma. The channels are connected to the optical measurement device and transmit the optical measurement signals. The time division multiplexer generates the optical measurement signals of a serial structure by collecting the optical measurement signals from the channel in different time and transmits the optical measurement signals to a diagnosing device. [Reference numerals] (111) First channel; (112) Second channel; (113) Third channel; (114) Fourth channel; (115) Fifth channel
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