| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for grinding a platy object, which prevents a backing pad which builds up during grinding from tearing due to touching a grinding pad, alleviates lopsided pressure of the grinding pad on the platy object, and prevents poor transfer of the grinding pad onto the next platy object to be ground in continuous grinding. <P>SOLUTION: The grinding device for the platy object includes the backing pad composed to adsorb and retain a first face on the main surface of the platy object, and a grinding pad composed to be pressed against a second face on the main surface of the platy object and to grind the second face. Auxiliary plates composed to prevent the buildup of the backing pad on the periphery of the platy object due to pressing the grinding pad are placed on the whole or part of the periphery of the platy object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
