| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid container attaching and detaching apparatus capable of attaching and detaching a liquid container to and from an application mechanism located at an optional position inside a defect correction apparatus, and the defect correction apparatus equipped with the liquid container attaching and detaching apparatus. <P>SOLUTION: In a defect correction apparatus 1 equipped with an ink application mechanism 10 for applying an ink to a defective part of a pattern formed on a substrate for correction, there is provided an attaching ink container exchanging apparatus 20A for attaching and detaching an ink container 18 for holding an ink in the ink application mechanism 10, which comprises a mounting holder 22 capable of holding the ink container 18 and a holder holding stand 81B which may support the mounting holder 22 so that the locational relationship with the ink application mechanism 10 is fixed, and may be moved corresponding to a movable range of the ink application mechanism 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
