| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process device which properly adjusts the lighting conditions according to a workpiece. <P>SOLUTION: A process device includes: a chuck table 20 holding a workpiece; process means processing the workpiece; imaging means 54 capturing images of the workpiece; and process-transferring means process-transferring the chuck table 20 and the process means relatively. The imaging means 54 includes: a camera capturing images of the workpiece; a half mirror 72 disposed on an optical axis of the camera 94; a first light source 70 vertically illuminating the workpiece through the half mirror 72; multiple optical fibers 112 annularly disposed with the optical axis of the camera 94 located in the center so that one end surfaces face the workpiece; a second light source 98 entering light into the other end surfaces of the multiple optical fibers 112 to perform ring illumination on the workpiece. The process device properly selects the first light source 70 or the second light source 98 or simultaneously operates the first and second light sources 70, 98 to illuminate the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT |
