发明名称 ORGANIC THIN FILM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING ORGANIC FILM
摘要 An organic thin film deposition system is disclosed. The organic thin film deposition system includes: a plurality of crucibles each having an inlet capable of selectively being opened and closed; an organic composite material made up of two or more organic materials and having an initial composition ratio, the organic composite material for placing in the plurality of crucibles; and a transferring unit for controlling a position of the plurality of crucibles.
申请公布号 US2012321789(A1) 申请公布日期 2012.12.20
申请号 US201113283300 申请日期 2011.10.27
申请人 HAMADA YUJI;JEONG HYE-IN 发明人 HAMADA YUJI;JEONG HYE-IN
分类号 C23C16/448;C23C16/52 主分类号 C23C16/448
代理机构 代理人
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