METHOD FOR GROWING AN ALN MONOCRYSTAL AND DEVICE FOR IMPLEMENTING SAME

摘要

The invention relates to the technology for producing three-dimensional monocrystals and can preferably be used in optoelectronics for manufacturing substrates for various optoelectronic devices, including light-emitting diodes that emit light in the ultraviolet region. The method for growing an AlN monocrystal by gas-phase epitaxy from a mixture containing a source of Al and NH3 comprises: arranging the Al source and a substrate, with the growth surface of said substrate turned towards said Al source, opposite one another in a growth chamber, said source and substrate forming a growth zone; producing a flow of NH3 in the growth zone; and heating the Al source and the substrate to temperatures that ensure the growth of the AlN monocrystal on the substrate. The Al source used is only free Al, the substrate is pretreated with Ga and/or In, whereupon the Al source is cooled to a temperature of 800-900°C and the substrate is annealed by being heated to a temperature of 1300-1400°C with subsequent cooling of said substrate to the nitriding temperature of the growth surface of said substrate. The invention ensures a reduction in the extent of flaws in the AlN monocrystal being grown.