| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the cost and improve the reliability. <P>SOLUTION: An electron multiplier 100 comprises: an insulation substrate 11 having an electric wiring pattern 20 and in which a through hole 16 is formed; a micro channel plate 12 (MCP) placed on one side of the through hole 16 of the insulation substrate 11 and electrically connecting with the electric wiring pattern 20; a shield plate 13 placed on the one side of the MCP 12 and electrically connecting with the MCP 12; an anode 15 placed on the other side of the through hole 16 and electrically connecting with the electric wiring pattern 20; and a signal reading terminal 19 fixed to the insulation substrate 11 and used for reading signals from the anode 15. The shield plate 13 is formed so as to include the MCP 12 when viewed in the thickness direction. A through hole 27, exposing at least a part of the MCP 12, is formed at the shield plate 13. The insulation substrate 11, the MCP 12, the shield plate 13, and the anode 15 are fixed to each other so as to be integrated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
