| 发明名称 |
METHOD OF PREDICTING SERVICE LIFE OF RESISTANCE HEATING TYPE HEATER, AND THERMAL PROCESSING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To predict a service life of a resistance heating type heater accurately at optional timing. <P>SOLUTION: Service life predicting information showing a relation between the service life of the resistance heating type heater and an integration value obtained by integrating a temperature of the resistance heating type heater with energization time of the resistance heating type heater is preliminarily obtained by using a heater of the same type as the resistance heating type heater. After starting the energization of the resistance heating type heater, the temperature of the resistance heating type heater is detected by a temperature sensor, the temperature of the resistance heating type heater after start of the energization is integrated with the energization time, and the integration value of the temperature and the service life predicting information are compared to predict the service life of the resistance heating type heater. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2012253222(A) |
申请公布日期 |
2012.12.20 |
| 申请号 |
JP20110125270 |
申请日期 |
2011.06.03 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
UENO MASAAKI;KOSUGI TETSUYA;MURATA HITOSHI;SUGISHITA MASASHI;HAYASHIDA AKIRA |
| 分类号 |
H01L21/31;H01L21/324;H05B3/00 |
主分类号 |
H01L21/31 |
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