发明名称 IMAGING APPARATUS AND PROGRAM AND METHOD FOR ANALYZING INTERFERENCE PATTERN
摘要 An imaging apparatus includes a shearing interferometer and a calculation unit configured to calculate information on an object from an interference pattern obtained by the shearing interferometer, wherein the calculation unit solves, as simultaneous equations, three or more equations that express Fourier components at coordinates in a wave number space obtained by performing a windowed Fourier transform on the interference pattern.
申请公布号 WO2012173017(A1) 申请公布日期 2012.12.20
申请号 WO2012JP64494 申请日期 2012.05.30
申请人 CANON KABUSHIKI KAISHA;NAGAI, KENTARO 发明人 NAGAI, KENTARO
分类号 G01N23/04;G01B9/02 主分类号 G01N23/04
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