ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE DEVICE, AND DEVICE MANUFACTURE METHOD

摘要

Provided is an illumination optical assembly with a high degree of freedom relating to change of polarization state. An illumination optical assembly which illuminates a surface to be illuminated with light from a light source comprises: a first spatial light modulator further comprising a plurality of optical elements which are arrayed in a first surface and which are controlled individually; a polarization member which is positioned on the light path closer to the surface to be illuminated than the first surface, and which applies a change of polarization state to a first light beam which transects a first region within a plane which intersects an optical axis of the illumination optical assembly which differs from a polarization state of a second light beam which transects a second region within the plane of intersection which differs from the first region; and a second spatial light modulator further comprising a plurality of optical elements which are arrayed either on the light path closer to the surface to be illuminated than the first surface or in a second surface on the optical path closer to the light source than the first surface and which are individually controlled, and variably forming a light intensity distribution in an illumination iris of the illumination optical assembly.