| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an energy degrader capable of mitigating the reduction in the transmittance of low-energy charged particle beams, and a charged particle beam irradiation system equipped therewith. <P>SOLUTION: The energy degrader includes a plurality of attenuation members 11A-11G with differing magnitudes of energy attenuation, and the low-energy-side attenuation member 11G with a high magnitude of energy attenuation is formed from material that has a transmittance exceeding that of the high-energy-side attenuation member 11A with a low magnitude of energy attenuation. <P>COPYRIGHT: (C)2013,JPO&INPIT |
