POSITIONING DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique that is advantageous for improving positioning accuracy.

SOLUTION: A positioning device includes: a stage; a base; a support mechanism for supporting the stage by a support part that is arranged between the stage and base and has spring property; an actuator that is arranged between the stage and the base so as to drive the stage; and a controller for controlling the actuator. The controller controls the actuator based on a location deviation of the stage to a target position and variations in the relative position between the stage and the base so that the location deviation is reduced and at least part of the force exerted on the stage is cancelled by the spring property of the support part.

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