发明名称 |
NORMALLY CLOSED MICROELECTROMECHANICAL SWITCHES (MEMS), METHODS OF MANUFACTURE AND DESIGN STRUCTURES |
摘要 |
Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A method of forming a micro-electrical-mechanical structure (MEMS), includes forming a plurality of electrodes on a substrate, forming a beam structure in electrical contact with a first of the electrodes, and bending the beam structure with a thermal process. The method further includes forming a cantilevered electrode extending over an end of the bent beam structure, and returning the beam structure to its original position, which will contact the cantilevered electrode in a normally closed position.
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申请公布号 |
US2012318648(A1) |
申请公布日期 |
2012.12.20 |
申请号 |
US201113161126 |
申请日期 |
2011.06.15 |
申请人 |
HALL DAWN D.;LAMOREY MARK C.H.;STAMPER ANTHONY K.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HALL DAWN D.;LAMOREY MARK C.H.;STAMPER ANTHONY K. |
分类号 |
H01H59/00;G06F17/50;H01H11/00 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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