发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
摘要 <p>This high-voltage MOS transistor (semiconductor device) includes: a semiconductor substrate (1) having an n-type well region (2), a p-type source region (5), and a p-type drain region (6) formed therein; a gate oxide film (7) formed on the semiconductor substrate (1); and an isolation oxide film (3) provided between the drain region (6) and the gate oxide film (7). In the well region (2), a p-type first diffusion layer (4) is formed in a region including the regions below the isolation oxide film (3), and also an n-type second diffusion layer (11) is formed below the first diffusion layer (4) at a distance from the first diffusion layer (4). The impurity concentration of the first diffusion layer (4) is lower than the impurity concentration of the drain region (6), and the impurity concentration of the second diffusion layer (11) is higher than the impurity concentration of the well region (2).</p>
申请公布号 WO2012172742(A1) 申请公布日期 2012.12.20
申请号 WO2012JP03535 申请日期 2012.05.30
申请人 PANASONIC CORPORATION;NISHIHARA, RIE 发明人 NISHIHARA, RIE
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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