发明名称 THIN-FILM TRANSISTOR AND METHOD OF MANUFACTURING THIN-FILM TRANSISTOR
摘要 <p>A thin-film transistor (10) according to the present invention is provided with: a substrate (1); a gate electrode (2) formed on the substrate; a gate insulation film (3) formed on the gate electrode; a crystalline silicon semiconductor layer (4) formed on the gate insulation film (3); an amorphous silicon semiconductor layer (5) formed on the crystalline silicon semiconductor layer; an organic protection film (6) comprising organic material formed on the amorphous silicon semiconductor layer; and a source electrode (8S) and a drain electrode (8D) formed on the amorphous silicon semiconductor layer, with the organic protection film interposed therebetween. The density of negative charge carriers contained in the amorphous silicon semiconductor layer (5) is not less than 3×1011 cm-2.</p>
申请公布号 WO2012172617(A1) 申请公布日期 2012.12.20
申请号 WO2011JP03471 申请日期 2011.06.17
申请人 PANASONIC CORPORATION;PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD.;KISHIDA, YUJI;KAWASHIMA, TAKAHIRO;KANEGAE, ARINOBU;KAWACHI, GENSHIROU 发明人 KISHIDA, YUJI;KAWASHIMA, TAKAHIRO;KANEGAE, ARINOBU;KAWACHI, GENSHIROU
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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