APPARATUS FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODES

摘要

PURPOSE: An apparatus for manufacturing an organic light emitting device is provided to easily discharge contaminants in a chamber to the outside by including a foreign material control in the transfer chamber. CONSTITUTION: A chamber(221) has a substrate transfer system transferring a substrate to multiple processing chambers. The chamber is composed of a chamber main body(221a) and a chamber lid(221b) covering the chamber main body. A ventilator(310) supplies gas(G) to the inside of the chamber. An exhaust system(320) is connected to the ventilator. The exhaust system simultaneously exhausts the gas and collects the gas. A filter unit(330) removes contaminants from the gas by being located between the ventilator and the exhaust system.