发明名称 IDENTIFICATION OF DIES ON A SEMICONDUCTOR WAFER
摘要 A semiconductor wafer includes multiple dies and a die identification region adjacent to or on each die. The die identification region can include a wafer indicator and a pattern of die locations representing die locations on the wafer. A die identification marker is provided in each pattern of die locations in the die identification region specifying a location of a respective die on the wafer.
申请公布号 US2012319307(A1) 申请公布日期 2012.12.20
申请号 US201113160885 申请日期 2011.06.15
申请人 WANG SHEN;FABINSKI ROBERT P.;DORAN JAMES E.;PACE LAUREL J.;MEISENZAHL ERIC J. 发明人 WANG SHEN;FABINSKI ROBERT P.;DORAN JAMES E.;PACE LAUREL J.;MEISENZAHL ERIC J.
分类号 H01L23/544 主分类号 H01L23/544
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