| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device and an exposure method, capable of accurately aligning a plurality of masks. <P>SOLUTION: An exposure device 1 uses at least one alignment mark 45 formed on a mask M and comprises: a reference bar 51 having a plurality of reference marks 55 corresponding to the alignment mark 45 of each mask M; and at least one camera 59 for imaging the reference marks 55 of the reference bar 51, and the alignment mark 45 of the mask M. Each mask M is aligned to the reference bar by displacing each mask holding part 11 to a predetermined position, based on relative position information read by the camera 59, between the reference marks 55 of the reference bar 51 and the alignment mark 45 of the mask M. <P>COPYRIGHT: (C)2013,JPO&INPIT |
