| 摘要 |
<P>PROBLEM TO BE SOLVED: To keep temperature in a pump at a higher constant temperature (uniformization) throughout the pump to simply prevent products from being generated and deposited inside the pump. <P>SOLUTION: A vacuum pump includes: a pump casing 54 including a plurality of pump chambers 50a-50f, an inlet port 52a communicating with the pump chamber located on an intake side, and an outlet port 52b communicating with the pump chamber located on a discharging side; a rotational shaft 58 rotatably supported at opposite ends thereof by bearings and extending in the longitudinal direction of the pump casing; and a plurality of rotors 60a-60f respectively housed in the pump chambers, coupled to the rotational shaft, and rotating in accordance with the rotation of the rotational shaft. The pump casing 54 includes a first thermally conductive member 72 extending parallel to the rotational shaft over the substantially full length of the pump casing in the longitudinal direction thereof, and a second thermally conductive member 74 positioned near an end of the first thermally conductive member 72 at the outlet port 52b and extending in a transverse direction of the pump casing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
