| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser processing device that enables maintenance performance to be more greatly enhanced at a manufacturer side. <P>SOLUTION: There are provided photodiodes 25, 39, 58 for detecting optical output information, power information and temperature information as data of the driving state of each of a seed light source 23, a preliminary amplifier 30 and a main amplifier 50, various driving circuits 22, 34, 52b, 53b and thermistors 36, 54. There are further provided a memory 21b for storing the data of driving information and date data at the detection time in association with a CPU 21a, and the CPU 21a that can output the date data and the data of the driving state stored in the memory 21b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
