GRAPHENE ELECTRONIC DEVICE HAVING A MULTI-LAYERED GATE INSULATING LAYER

摘要

PURPOSE: A graphene electronic device having a multi-layered gate insulating layer is provided to improve electrical characteristics of a grapheme by forming a gate insulating layer of a double layer between a graphene channel layer and a gate electrode. CONSTITUTION: A conductive substrate serves as a gate electrode. A gate insulating layer(120) is arranged on the substrate. A graphene channel layer(130) is formed on the gate insulating layer. A source electrode(141) and a drain electrode(142) are arranged on both ends of the graphene channel layer. The gate insulating layer comprises and inorganic material insulating layer and an organic compound insulating layer on the inorganic material insulating layer.